Ultrapure Water (UPW)

Phase 3: Polishing Loop (Sub-PPB) Calculators & Design Tools

185nm UV TOC destruction, Mixed Bed Polisher Thomas kinetics, 254nm UV/Pd DO degasser & POU UF.

SEMI F63 / ASTM D5173 / International Roadmap for Devices and Systems (IRDS)

185 nm Photolytic TOC Destruction UV Sizer

Required UV dose (mJ/cm²), lamp power & EEO energy for sub-ppb TOC purification

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ASTM D5127 / SEMI F63 / Rohm & Haas AmberLite UPW Resin Standards

Mixed Bed Polisher (MBP) & Thomas Resin Kinetics Sizer

BV/h throughput, stoichiometric resin ratio, and Silica (<0.5 ppb) & Boron breakthrough kinetics

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SEMI UPW Specifications / ASTM D5127 / Rohm & Haas AmberLite Catalytic Resin Data

254 nm UV Disinfection & Catalytic DO Degasser Engine

Microbial UV log reduction, Palladium catalyst resin volume & continuous H₂ gas injection for DO <1 ppb

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SEMI F63 / ASTM D5127 / SEMI E49 UPW Particulate Specifications

Point-of-Use (POU) Ultrafiltration (UF) Sizer

Cross-flow velocity, Transmembrane Pressure (TMP) & particle/bacteria rejection metrics

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